Ultrahigh vacuum gauges
Posted: Thu Feb 02, 2023 1:35 pm
This is a 22 page chapter from CERN that covers hot and cold gauges. It starts with some background/history, covers calibration etc. so it has some math.
Figure 3 is a graph of: Generated ions per centimeter electron path length per millibar at 20°C versus kinetic energy of incident electrons for various gases.
-Peter
Figure 3 is a graph of: Generated ions per centimeter electron path length per millibar at 20°C versus kinetic energy of incident electrons for various gases.
-Peter