We use a STEC SEC-7440M mass flow controller. It is older (Analog), rated at 200 SCCM, and calibrated in Argon.
We are able to control the chamber pressure in increments of 1 micron, from 10-200 microns. These beat the heck out of trying to balance pressure using a needle valve, the control is so much finer.
Mass flow controller question
- russssellcrow
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