Germanium Sputtering in the new Reserach Facility

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John Futter
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Real name: John Futter
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Re: Germanium Sputtering in the new Reserach Facility

Post by John Futter »

as promised a few pics of a Ge target that got a little hot
Ge_Melt1.jpg
Ge_Melt2.jpg
Ge_Melt3.jpg
Ge_Melt6.jpg
ian_krase
Posts: 636
Joined: Mon Nov 28, 2016 2:48 am
Real name: Ian Krase

Re: Germanium Sputtering in the new Reserach Facility

Post by ian_krase »

Those spikes remind me of the tungsten field emitters formed for vacuum microelectronics (basically MEMS vacuum tubes)

I use a standard KF40 manual angle valve plus a needle gas inlet valve to adjust pressure. The meaningful adjustment range for the gate valve is all pretty close to closed, but you get a good number of degrees between hermetically closed and substantially open.


What's the anode in this system? Does it have a way of biasing the substrate?
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