Germanium Sputtering in the new Reserach Facility
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- Real name: John Futter
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Re: Germanium Sputtering in the new Reserach Facility
as promised a few pics of a Ge target that got a little hot
Re: Germanium Sputtering in the new Reserach Facility
Those spikes remind me of the tungsten field emitters formed for vacuum microelectronics (basically MEMS vacuum tubes)
I use a standard KF40 manual angle valve plus a needle gas inlet valve to adjust pressure. The meaningful adjustment range for the gate valve is all pretty close to closed, but you get a good number of degrees between hermetically closed and substantially open.
What's the anode in this system? Does it have a way of biasing the substrate?
I use a standard KF40 manual angle valve plus a needle gas inlet valve to adjust pressure. The meaningful adjustment range for the gate valve is all pretty close to closed, but you get a good number of degrees between hermetically closed and substantially open.
What's the anode in this system? Does it have a way of biasing the substrate?